Mainly used for 3-6 inch III-V compound semiconductor crystal materials in high vacuum state for oxygen-free sealing process, equipped with automatic control system.

2. Technical Parameters:

3. Main Features and Advantages of Equipment

1. Capable of querying historical temperature records; historical data and temperature curves.

2. Curve viewing function: Features temperature, gas, power, vacuum level viewing capabilities.

3. Manual/automatic control function: Includes temperature, gas, power settings, and valve control functions.

4. Alarm viewing function: Capable of querying alarm types.

5. Power limit protection: Different temperatures can be set with different maximum power limits.

6. Hierarchical management: Different personnel can modify parameters based on login status.

7. Data export function: Can export recorded temperature and flow data to a USB drive.

The system hardware has highly flexible expansion capabilities, conveniently adding functions such as boat driving control and gas flow meter control for various furnaces.