The vertical oxidation furnace equipment can be applied in various fields such as integrated circuits, discrete devices, POWER, MEMS, etc., suitable for high-temperature dry/wet oxidation, DCE oxidation, nitrogen implantation oxidation, diffusion, GPP, annealing, alloying, and other processes for 6-12-inch wafer substrates.

The oxidation process involves placing the wafer in an oxygen or water vapor environment for high-temperature thermal treatment, forming an oxide film on the wafer surface. This film can serve as a barrier layer for ion implantation, an injection penetration layer, surface passivation, or an interlayer for device structures.

This equipment system is a vertical single-chamber furnace tube with highly automated process control. It mainly includes the main unit, power cabinet, gas cabinet, heating system, transmission system, and other components.

2. Equipment Parameter Types:

3. Main Features and Advantages of the Equipment

1★ Powerful operational functionality with a Windows interface and display screen operation, allowing users to conveniently modify process control parameters and monitor various process statuses in real-time; equipped with fault self-diagnosis software, significantly reducing maintenance time;

2★ Adopts a reliable industrial computer + PLC mode for fully automated control of furnace temperature, boat movement, gas flow, and valves, achieving complete automation of all process steps;

3★ The program supports manual/automatic operation. After a power outage or mid-process shutdown, restarting allows temperature ramping based on the process manually, saving process time;

4★ Features multiple process pipelines for user convenience;

5★ The boat push-pull control uses high-speed pulse closed-loop control to avoid motor step loss and operational vibration. After completing a cycle, the boat automatically calibrates its position to effectively prevent positioning deviation;

6★ Precise gas flow control with analog signal closed-loop control, strong/weak electrical separation, and standard bus communication for all data interactions, enhancing anti-interference capability and ensuring data security; gas valves feature soft-start functionality;

7★ Equipped with multiple alarm functions and safety protection features;
8★ Automatic adjustment of the constant temperature zone, cascade control, and accurate control of the actual process temperature in the reaction tube;